Semiconductor Fused Quartz
The combination of purity, consistency and fusion quality make IOTA® the only trusted quartz product for semiconductor production. IOTA quartz is the ideal base material for the manufacture of fused quartz crucibles used in the Czochralski (CZ) process. Semiconductor device fabricators count on IOTA quartz purity and proven reliability for their diffusion and annealing process tubes, wafer etching parts and handling systems. It is the high purity of the IOTA product that enables these parts to withstand the chemical and temperature extremes of wafer processing.
Unimin's high purity quartz portfolio for semiconductor grade applications includes IOTA 4, IOTA 6, IOTA 6-SV, IOTA 8 and IOTA STD-SV. The low alkali content of these products results in fused quartz with high viscosity. This provides a high softening point and low crystallization rate, which extends part life and reduces the overall cost of ownership. Consistently low Boron (B) and minute levels of transition metals help maintain the purity of the silicon during crystal growth and wafer processing.
IOTA® CHEMICAL ANALYSIS
Typical Values (ppm)
|IOTA 4||8||< 0.05||0.7||0.007||0.004||0.3||0.4||0.2||0.07||0.013||1.0||0.002||0.1||1.4||0.01|
|IOTA 6||8||< 0.05||0.7||0.003||0.001||0.2||0.1||0.2||0.07||0.008||< 0.1||0.002||0.1||1.4||0.01|
|IOTA 6-SV||8||< 0.05||0.5||0.002||0.001||0.1||< 0.1||0.2||0.02||0.004||< 0.05||0.001||< 0.05||1.3||0.01|
|IOTA 8||8||< 0.05||0.4||0.001||< 0.001||< 0.05||< 0.05||< 0.05||0.01||0.001||< 0.05||< 0.001||< 0.05||1.3||0.01|
|IOTA STD-SV||14||< 0.10||0.3||0.004||0.003||0.1||< 0.1||0.5||0.01||0.007||< 0.05||0.001||0.1||1.1||0.01|
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